Degradation by water vapor of hydrogenated amorphous silicon oxynitride films grown at low temperature
Table 4 from Optimization of plasma-enhanced chemical vapor deposition silicon oxynitride layers for integrated optics applications
PDF] Moisture Resistance of Insulating Films for Compound Semiconductor Devices
PDF) Nonequilibrium water permeation in SiO2 thin films
PDF) Chemical and morphological properties of amorphous silicon oxynitride films deposited by plasma enhanced chemical vapor deposition
PDF] Diffusion of Water Molecules in Amorphous Silica
Nanomaterials, Free Full-Text
PDF) Chemical and morphological properties of amorphous silicon oxynitride films deposited by plasma enhanced chemical vapor deposition
Classification of the Categories of Amorphous Hydrogenated Silicon Oxynitride Films Using Infrared Spectroscopy
PDF) Chemical and morphological properties of amorphous silicon oxynitride films deposited by plasma enhanced chemical vapor deposition