High aspect ratio silicon ring-shape micropillars fabricated by deep reactive ion etching with sacrificial structures - ScienceDirect

Ultra high aspect-ratio and thick deep silicon etching (UDRIE

Deep reactive ion etching - ScienceDirect

High aspect ratio silicon and polyimide nanopillars by combination

PDF) Metal assisted chemical etching for high aspect ratio

High aspect ratio dependent effects in high-density plasma etching

High aspect ratio silicon ring-shape micropillars fabricated by

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High aspect ratio etched sub-micron structures in silicon obtained

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Optimization of deep reactive ion etching for microscale silicon